FDC & SPC Integration
Bidirectional fault detection and SPC integration. Reads Cpk/Ppk, correlates FDC events with inspection excursions, and writes corrective action signals back to APC — without modifying your existing qualified SPC setup.
Connecting FDC and SPC to inspection data.
The FDC & SPC module solves the most common bottleneck in excursion analysis: your Cpk degradation is visible in the SPC server, and the coincident FDC event is visible in the FDC server, but they live in separate databases with separate access paths. Correlation currently happens in an engineer's head.
The module connects to both systems — reading Cpk/Ppk values in real time and listening to the FDC event stream — and correlates both against wafer map excursions as they occur. When the wafer map analysis module flags an edge ring on a CMP layer, the FDC module automatically searches the lookback window for coincident CMP slurry flow deviation events and includes them in the evidence package.
The bidirectional write path is optional and separately validated: when enabled, the module writes corrective action offset recommendations back to the APC controller via SECS/GEM at configurable confidence thresholds.
| Parameter | Description | Value |
|---|---|---|
| SPC connection method | Read path from SPC server | Database query / REST hook |
| FDC connection method | Event stream from FDC server | e-Diagnostics / direct DB |
| Cpk computation | Live computation, per-lot update | Per tool, per parameter |
| EWMA filter | Short-run process noise reduction | Configurable λ, default 0.2 |
| APC write path | Corrective action to APC | SECS/GEM, optional, gated |
| Lookback window | FDC event cross-reference range | Configurable, default 72 h |
Four integration functions in one module.
Live Cpk / Ppk Computation
Reads SPC parameter values in real time from Spotfire, JMP, or in-house SPC servers. Computes Cpk and Ppk per tool per parameter. Flags when a parameter crosses 1.33 or 1.0 thresholds (configurable).
FDC Event Correlation
Listens to the FDC event log for recipe deviation, hardware fault, and limit-exceeded events. Correlates FDC events against wafer map excursions within the configurable lookback window. Scores coincident events by proximity and parameter relevance.
EWMA Noise Filtering
Exponentially weighted moving average filter applied to short-run process steps where lot-sample variance is high. Reduces false-positive SPC alerts on processes with <25 wafers per run. Configurable smoothing factor λ.
Run-to-Run APC Write
Optional bidirectional path: when a corrective action is computed and confidence exceeds the configured threshold, the module writes the offset recommendation to the APC controller via SECS/GEM. Validated separately before enabling at each site.
Connects to your current SPC and FDC stack.
No migration required. Wafercadence reads from existing SPC databases and FDC servers — your qualified processes remain unchanged. The module does not replace your SPC system or your FDC server. Your existing change-controlled SPC rules and FDC fault classifications are unmodified. Wafercadence reads what those systems already generate.
| System Type | Supported Platforms | Read Method | Write Path |
|---|---|---|---|
| SPC Server | Spotfire, JMP, in-house SPC servers | Database query, REST hook | — |
| FDC Server | Applied Materials FDC, third-party FDC | e-Diagnostics, direct DB | — |
| APC Controller | APC via MES or direct equipment interface | — | SECS/GEM (optional, gated) |
| Fab MES | Workstream, Camstar | GEM300, OData | GEM300 callback |
Connect your SPC and FDC data to the yield picture.
Bring a description of your current SPC and FDC setup. We'll map the integration path and show you how long it takes to wire up.