PLATFORM MODULE

MES / SECS-GEM Connectors

Pre-built connectors for Workstream, Camstar, Synopsys Yield Explorer, and PDF Exensio. SECS/GEM, GEM300, and e-Diagnostics integration paths. Basic ingest — KLARF file drop and lot traveler reads — requires no change control at most sites.

< 4 h First KLARF to first correlation
4+ MES Pre-built connector support
0 cloud All data stays on-premise
INTEGRATION EXAMPLE

KLARF file ingest via SECS/GEM.

The SECS/GEM read path requires no change control. Wafercadence subscribes to the inspection tool's equipment state and data events on a passive read socket.

SECS-II message — S6F11 (EventReport) → KLARF file path SECS-II/HSMS 
S6F11 W
<L [3]
  <U4 0>
  <U4 1>
  <L [2]
    <L [2]
      <A "KLARF_FILE_PATH">
      <A "/data/inspection/lot_A245B/W03.001">
    >
    <L [2]
      <A "LOT_ID">
      <A "A245B">
    >
  >
>
Wafercadence ingest response — evidence package available JSON 
{
  "lot_id": "A245B",
  "wafer": "W03",
  "pattern": "edge_ring",
  "confidence": 0.94,
  "d0": 0.18,
  "correlation_ms": 43,
  "evidence_ready": true,
  "top_candidate": {
    "attribute": "chamber_id",
    "value": "CMP-A02",
    "chi2_score": 14.7,
    "p_value": 0.0001
  }
}
CONNECTOR COVERAGE

Pre-built connectors for your existing stack.

We do not require MES upgrades, inspection tool firmware changes, or SECS/GEM reconfiguration at the equipment side. The connectors listed below operate as passive read clients — they observe the data stream your existing equipment already produces.

System Connector Type Read Path Write Path Change Control
Workstream 4.x / 5.x MES GEM300, REST API GEM300 callback Not required
Camstar 6.x / 7.x MES SECS-II/HSMS, OData SECS-II/HSMS (optional) Site-dependent
Synopsys Yield Explorer Yield analysis Exensio-compatible schema — Not required
PDF Exensio Yield analysis Exensio API / shared schema — Not required
KLA-class inspection Inspection tool KLARF file drop, SECS/GEM stream — Not required
ASML HMI-class Inspection tool IBIS standard, HMI CSV — Not required
Applied Materials FDC FDC server e-Diagnostics, direct DB — Site-dependent
Advantest / Teradyne ATE Test equipment (OSAT) GEM300, SECS-II/HSMS — Not required
PROTOCOL SUPPORT

Protocols supported by the connector layer.

SECS-II / HSMS

Full SEMI E5 (SECS-II) message set over SEMI E37 (HSMS) TCP/IP transport. Supports S6F11 event reports, S1F3/S1F4 status requests, and S9F9/S9F11 message error handling.

GEM / GEM300

SEMI E30 (GEM) and E157 (GEM300) equipment model. Supports collection events, data variables, remote commands, and equipment constant reads. 300mm tool recipe management via GEM300 SEMI E40.

e-Diagnostics

SEMI E87 e-Diagnostics for FDC system integration. Supports fault detection event subscription and classified equipment fault log access for FDC correlation.

File Drop / Shared Path

KLARF, IBIS, and HMI CSV files ingested from shared network paths with configurable polling interval. No SECS/GEM required. Typical for KLA-class inspectors not yet on GEM300.

Database / REST

Direct database query connectors for SPC servers and MES databases that expose their lot and parameter data via SQL or OData/REST. Schema mapping configured at installation. No vendor API changes required.

Air-Gap Transfer

For completely isolated network environments: data ingested via a controlled transfer process (USB HSM or optical diode one-way transfer). Same connector schema; data traversal method changes. No cloud path required or created.

Start with your existing data path.

Tell us which inspection tools, MES, and SPC systems you're running. We'll scope the connector path and give you an integration timeline before any commitment.

Request Technical Evaluation Integration Guide